JPH0577003B2 - - Google Patents
Info
- Publication number
- JPH0577003B2 JPH0577003B2 JP10308486A JP10308486A JPH0577003B2 JP H0577003 B2 JPH0577003 B2 JP H0577003B2 JP 10308486 A JP10308486 A JP 10308486A JP 10308486 A JP10308486 A JP 10308486A JP H0577003 B2 JPH0577003 B2 JP H0577003B2
- Authority
- JP
- Japan
- Prior art keywords
- slit
- inspected
- line sensor
- detection
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007547 defect Effects 0.000 claims description 64
- 238000001514 detection method Methods 0.000 claims description 60
- 238000007689 inspection Methods 0.000 claims description 26
- 238000001228 spectrum Methods 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 description 21
- 230000003287 optical effect Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 230000003595 spectral effect Effects 0.000 description 7
- 239000003550 marker Substances 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004611 spectroscopical analysis Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005337 ground glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61103084A JPS62261006A (ja) | 1986-05-07 | 1986-05-07 | 表面欠陥検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61103084A JPS62261006A (ja) | 1986-05-07 | 1986-05-07 | 表面欠陥検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62261006A JPS62261006A (ja) | 1987-11-13 |
| JPH0577003B2 true JPH0577003B2 (en]) | 1993-10-25 |
Family
ID=14344766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61103084A Granted JPS62261006A (ja) | 1986-05-07 | 1986-05-07 | 表面欠陥検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62261006A (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004007829B4 (de) * | 2004-02-18 | 2007-04-05 | Isra Vision Systems Ag | Verfahren zur Bestimmung von zu inspizierenden Bereichen |
| JP5323320B2 (ja) * | 2006-07-19 | 2013-10-23 | 有限会社シマテック | 表面検査装置 |
| JP2015096837A (ja) * | 2013-11-15 | 2015-05-21 | 株式会社島津製作所 | 表面形状計測装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5954221U (ja) * | 1982-10-04 | 1984-04-09 | ダイハツ工業株式会社 | トランスフア装置の２輪・４輪切換用ドツグクラツチ |
-
1986
- 1986-05-07 JP JP61103084A patent/JPS62261006A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62261006A (ja) | 1987-11-13 |
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